PNEUMATIC MICROVALVE BASED ON SILICON MICROMACHINING
نویسندگان
چکیده
منابع مشابه
Dry Etching Based Silicon Micromachining
The aim of this work is to demonstrate the “dry” etching based micro-fabrication technologies in the manufacturing of Single Crystal Silicon (SCS) for Micro-Electro/(Optical)-Mechanical-Systems (ME(O)MS). The ME(O)MS technology is very fast growing industry branch based often on the same silicon technology as integrated circuits. The process of plasma-dry etching is quite simple straightforward...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 1996
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.116.56